On some factors limiting depth resolution during SIMS profiling
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference24 articles.
1. Theoretical and experimental studies of the broadening of dilute delta-doped Si spikes in GaAs during SIMS depth profiling
2. SIMS profile simulation using delta function distributions
3. Thermodynamic and fractal geometric aspects of ion-solid interactions
4. When is thermodynamics relevant to ion-induced atomic rearrangements in metals?
5. A phenomenological model for low-temperature ion mixing in dilute systems
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