AMS studies of the diffusion of chlorine in silicon wafers-Reference-Cited by-同舟云学术

AMS studies of the diffusion of chlorine in silicon wafers

Published:1995-05 Issue:1-4 Volume:99 Page:549-552
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Datar S.A.,Gove H.E.,Teng R.T.D.,Lavine J.P.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

1. VLSI Technology,1983

5. IBM-Research;Ziegler;TRIM-90,1990

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