T-DYN Monte Carlo simulations applied to ion assisted thin film processes-Reference-Cited by-同舟云学术

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T-DYN Monte Carlo simulations applied to ion assisted thin film processes

Published:1991-07 Issue: Volume:59-60 Page:21-27
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Biersack J.P.,Berg S.,Nender C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids

2. Sputtering studies with the Monte Carlo Program TRIM.SP

3. Ion assisted selective thin film deposition

4. Ion assisted selective deposition of thin films

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