Range profiles of Ar implanted into C films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Effective stopping-power charges of swift ions in condensed matter
2. Projected ranges and range stragglings of Au and Bi implanted into carbon films and into SiO2
3. P.L. Grande, private communication.
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1. Depth distribution of Bi+ and Fe+ implanted into polyimide (C22H10N2O5)n;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2000-11
2. Diffusion behavior study of Yb+ and Er+ implanted into polyimide (C22H10N2O5)n;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-09
3. Range and thermal behaviour studies of Tm+, Er+ and Yb+ implanted into LiNbO3 and quartz crystal;Materials Science and Engineering: B;1997-06
4. The mean projected range and range straggling of Xe ions implanted in Si and Si1N1.375H0.603;Materials Science and Engineering: B;1996-06
5. Determination of the lateral spread of Xe ions in silicon nitride and hydrated silicon nitride films by oblique incidence Rutherford backscattering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-01
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