Range profiles of Ar implanted into C films-Reference-Cited by-同舟云学术

Range profiles of Ar implanted into C films

Published:1988-02 Issue:1 Volume:30 Page:13-15
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Abel F.,Behar M.,Cohen C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

3. P.L. Grande, private communication.

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