The mean projected range and range straggling of Xe ions implanted in Si and Si1N1.375H0.603
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference22 articles.
1. Range profiles of medium and heavy ions implanted into SiO2
2. Projected ranges and range stragglings of Au and Bi implanted into carbon films and into SiO2
3. Range profiles of 50 to 400 keV Hg+ in quartz crystal
4. Z1-oscillations in low-energy heavy-ion ranges
5. Evidence for an insulator—metal effect on the Z1 range oscillations in the nuclear stopping regime
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