Synthesis and corrosion properties of silicon nitride films by ion beam assisted deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Thick and homogeneous surface layers obtained by reactive ion-beam-enhanced deposition
2. Microporosity and adhesion of ion bombarded thin silicon surface films
3. Handbook of Ion Beam Processing Technology,1989
4. Use of ion beam assisted deposition to modify the microstructure and properties of thin films
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