Exploiting Si/CoSi2/Si heterostructures grown by mesotaxy

Author:

White Alice E.,Short K.T.,Maex Karen,Hull R.,Hsieh Yong-Fen,Audet S.A.,Goossen K.W.,Jacobson D.C.,Poate J.M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Materials Processing;Ion Beams in Materials Processing and Analysis;2012

2. Formation of cobalt silicide films by ion beam deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-01

3. Synthesis of CoSi2-structures using ion microprobes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-03

4. Buried Cobalt Silicide Layer under Thin Silicon Film Fabricated by Wafer Bonding and Hydrogen‐Induced Delamination Techniques;Journal of The Electrochemical Society;1999-07-01

5. Molecular beam allotaxy: a new approach to epitaxial heterostructures;Journal of Physics D: Applied Physics;1998-01-07

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