Possible mechanisms for particle transport in ion implanters-Reference-Cited by-同舟云学术

Possible mechanisms for particle transport in ion implanters

Published:1991-04 Issue:1-4 Volume:55 Page:348-354
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Brown D.A.,Sferlazzo P.,O'Hanlon J.F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

1. Particle contamination in implanters

2. Prevention of Aerodynamic Particle Transport in Air Handling Wafer Processing Equipment;Mack,1989

3. Theoretical and experimental study of space charge in intense ion beams

4. Beam Transport With Space Charge Compensation;Klabunde,1986

5. Theoretical Study of Particle Charging and Entrapment in a Cylindrical Ion Beam;Brown,1990

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Two-dimensional charge densities in intense rectangular ion beams with space-charge neutralization;Physical Review E;1995-07-01

2. Particle generation in ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03

3. Space-charge divergence of an intense, unneutralized rectangular ion beam;Physical Review E;1993-07-01

4. PARTICLE PERFORMANCE OF THE E1000;Ion Implantation Technology–92;1993

5. Experimental Evidence for Beam Particulate Transport in Ion Implanters;Ion Implantation Technology–92;1993