Channeling of B and As near the silicon 〈001〉 axis
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. Proc. Conf. on Ion Beam Modification of Materials,1985
2. Channeling of ions near the silicon 〈001〉 axis
3. Channeling effect for low energy ion implantation in Si
4. MRS meeting;Hautala,1985
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Binary collision simulations of ion transmission through silicon single crystal films;Radiation Effects and Defects in Solids;1994-07
2. Binary-collision-cascade simulation of hyperchanneling of high-energy helium ions in silicon;Physical Review B;1993-01-15
3. Computer simulation studies of ion implantation in crystalline silicon;IEEE Transactions on Electron Devices;1992
4. Monte Carlo simulations of ion implantation in crystalline targets;Materials Science and Engineering: B;1989-02
5. Monte Carlo simulation of two-dimensional distributions of implanted ions in a crystalline silicon target;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1988-07
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