Author:
Meijer J.,Stephan A.,Bukow H.H.,Rolfs C.,Bruhn F.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
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1. Microprobe as implanter for semiconductor devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-09
2. Stencil masks for high energy ion projection;Microelectronic Engineering;1999-05
3. High energy implantation by ion projection;Microelectronic Engineering;1998-03
4. Investigation of the resolution affecting parameters of a nuclear microprobe using a solenoid lens;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-06