Low energy B-channeling in Si
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Ultra low energy (100–2000 eV) boron implantation into crystalline and silicon-preamorphized silicon
2. Long-range channelling in low energy ion implantation into silicon
3. Computational models in atomic collision studies
4. Theoretical description of elastic atom—atom scatteringd
5. Computer simulation studies of low energy B implantation into amorphous and crystalline silicon
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