On the determination of two-dimensional carrier distributions
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
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2. Characterization of electrically active dopant profiles with the spreading resistance probe;Materials Science and Engineering: R: Reports;2004-12-31
3. Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
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