Study of carbon and oxygen incorporation in reactively sputtered Cr-Si-Al films using ERDA

Author:

Neelmeijer C.,Grötzschel R.,Klabes R.,Kreissig U.,Sobe G.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Comparison of elastic resonance and elastic recoil detection in the quantification of carbon in SiGeC;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09

2. Introduction;Forward Recoil Spectrometry;1996

3. Partially reactive d.c. magnetron sputtering — a key to new understanding of reactive plasma sputter deposition?;Surface and Coatings Technology;1995-09

4. Simultaneous detection of light elements by ERDA with gas-ionisation/Si ΔE-E detector telescope;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-09

5. Analysis of boron-doped amorphous silicon by means of a heavy-ion time-of-flight ERD spectrometer;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-05

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