Computer simulation of ion implantation into crystalline targets
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. The Stopping and Range of Ions in Solids;Ziegler,1985
2. A Monte Carlo computer program for the transport of energetic ions in amorphous targets
3. Channeling implants of boron in silicon
4. Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
5. K.M. Klein, C. Park and A.F. Tasch, MRS 1990 Fall Meeting, Boston, USA, in press.
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