Author:
Satou M.,Fujii K.,Kiuchi M.,Fujimoto F.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference13 articles.
1. Proc. Int. Workshop by Professional Group on Ion-based Techniques for Film Formation;Satou,1981
2. Proc. 6th Symp. Ion Sources and Ion-Assisted Technology;Satou,1982
3. Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam Bombardment
4. A new machine for film formation by ion and vapour deposition
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