Structural defects and the state of implanted ions in silica glasses implanted with silicon and/or nitrogen ions-Reference-Cited by-同舟云学术

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Structural defects and the state of implanted ions in silica glasses implanted with silicon and/or nitrogen ions

Published:1992-03 Issue:1-4 Volume:65 Page:375-379
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hideo Hosono

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. Low‐loss integrated optical waveguides fabricated by nitrogen ion implantation

2. Formation of buried oxynitride layers in silica glass by ion implantation

3. On the formation of silicon oxynitride by ion implantation in fused silica

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