Low‐loss integrated optical waveguides fabricated by nitrogen ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94423
Reference6 articles.
1. Resonance effects in low-loss ring waveguides
2. Three‐prism loss measurements of optical waveguides
3. Quantitative Auger microanalysis of the silicon–oxygen–nitrogen system
4. Direct Thermal Nitridation of Silicon Dioxide Films in Anhydrous Ammonia Gas
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