Subject
Instrumentation,Nuclear and High Energy Physics
Reference6 articles.
1. MeV implantation for VLSI
2. Ion Implantation;Seidel,1971
Cited by
6 articles.
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1. Megaelectronvolt implantations in silicon very-large-scale integration;Materials Science and Engineering: B;1989-02
2. Buried dopant and defect layers for device structures with high-energy ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
3. Feasibility of high-energy boron implantation for p-type retrograde well formation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
4. An RFQ accelerator system for MeV ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
5. Defects Produced by High Energy Oxygen Ions Implanted in Silicon;MRS Proceedings;1989