A new computer designed faraday system for high current ion implantation systems-Reference-Cited by-同舟云学术

A new computer designed faraday system for high current ion implantation systems

Published:1987-01 Issue:1-4 Volume:21 Page:354-359
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Outcault R.,McKenna C.,Robertson T.,Biondo L.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Ion Implantation: Equipment and Techniques;Hanley,1983

3. D. Downey, Varian Internal Report, unpublished.

4. these Proceedings Ion Implantation Technology;Wauk,1987

5. Ion Implantation Techniques;McKenna,1983

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