Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
8 articles.
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1. Gold-cluster ranges in aluminium, silicon and copper;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-12
2. The dependence of ultrashallow junction depths on impact dose rates;Applied Physics Letters;1995-08-28
3. Control of defects in C+, Ge+, and Er+ implanted Si using post amorphization and solid phase regrowth;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
4. Characterization of ultra-shallow p/sup +/-n junction diodes fabricated by 500-eV boron-ion implantation;IEEE Transactions on Electron Devices;1991
5. Shallow junction formation by boron implantation with energies between 2 and 5 keV and rapid thermal annealing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02