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Ion microprobe system combined with scanning electron microscope for high precision aiming

  • Published:1992-12 Issue:3-4 Volume:72 Page:436-441
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Ohdomari I.,Sugimori M.,Koh M.,Noritake K.,Takiguchi Y.,Shimizu H.,Tanaka R.,Kamiya T.,Utsunomiya N.,Minehara E.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Integrated fiducial sample mount and software for correlated microscopy;Review of Scientific Instruments;2014-02

2. Single-ion irradiation: physics, technology and applications;Journal of Physics D: Applied Physics;2008-01-28

3. Single-ion detection using nuclear track detector CR-39 plastic;Review of Scientific Instruments;1999-12

4. Novel method of nuclear microprobe beam profile determination;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07

5. Radiation immunity of pMOSFETs and nMOSFETs examined by means of MeV He single ion microprobe;Applied Surface Science;1996-09
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