Characteristics and peculiarities of surface processing by gas cluster ion beams-Reference-Cited by-同舟云学术

Characteristics and peculiarities of surface processing by gas cluster ion beams

Published:1996-05 Issue:1-4 Volume:112 Page:242-247
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Yamada Isao

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

1. Proc. Int. Conf. on Ion Implantation Technology,1993

2. Proc. 3rd IUMRS & Int. Conf. on Adv. Mat.,1994

5. Proc. ICSSPIC-7;Akizuki,1994

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