Current research and development topics on gas cluster ion-beam processes
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.1894419
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1. Impact of surface preparation for n-type Si:P and p-type SiGe:B semiconductors on low resistance silicide contacts;Microelectronic Engineering;2017-04
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3. Energetic cluster ion beams: Modification of surfaces and shallow layers;Materials Science and Engineering: R: Reports;2011-08
4. Imaging mass spectrometry with nuclear microprobes for biological applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-06
5. XPS and QCM Studies of Hydrocarbon and Fluorocarbon Polymer Films Bombarded by 1−20 keV C60 Ions;The Journal of Physical Chemistry C;2007-06-16
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