Current research and development topics on gas cluster ion-beam processes

Author:

Yamada Isao,Toyoda Noriaki

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Impact of surface preparation for n-type Si:P and p-type SiGe:B semiconductors on low resistance silicide contacts;Microelectronic Engineering;2017-04

2. Cluster–surface interaction: From soft landing to implantation;Surface Science Reports;2011-10

3. Energetic cluster ion beams: Modification of surfaces and shallow layers;Materials Science and Engineering: R: Reports;2011-08

4. Imaging mass spectrometry with nuclear microprobes for biological applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-06

5. XPS and QCM Studies of Hydrocarbon and Fluorocarbon Polymer Films Bombarded by 1−20 keV C60 Ions;The Journal of Physical Chemistry C;2007-06-16

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