Materials aspects of ion beam synthesis of epitaxial suicides
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference38 articles.
1. Submicron Integrated Circuits;Watts,1989
2. Suicides for VLSI Applications;Murarka,1983
3. Epitaxial growth of transition-metal silicides on silicon
4. Semiconducting silicide-silicon heterostructures: growth, properties and applications
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