High Miller index channeling in silicon substrates-Reference-Cited by-同舟云学术

High Miller index channeling in silicon substrates

Published:1993-04 Issue:1-2 Volume:74 Page:142-146
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Simonton Robert B.,Magee Charles W.,Tasch Al F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. Ion Implantation Technology;Simonton,1992

3. NV-6200AV, Eaton SED, 2433 Rutland Dr., Austin, TX, 78758, USA.

5. TP-300, Therma-Wave, Inc., 47320 Mission Falls Court, Fremont, CA, 94539, USA.

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