Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Silicon Device Processing;Materials Science and Technology;2013-02-15
2. Plasma immersion ion implantation reactor design considerations for oxide charging;Surface and Coatings Technology;1996-11
3. Modelling of charging effects in plasma immersion ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
4. Ion Implanters;Ion Implantation: Basics to Device Fabrication;1995
5. Characteristics of sub-100-nm p/sup +//n junctions fabricated by plasma immersion ion implantation;IEEE Electron Device Letters;1993-09