Author:
Yoshiaki Mokuno ,Yuji Horino ,Akiyoshi Chayahara ,Masato Kiuchi ,Kanenaga Fujii ,Mamoru Satou ,Mikio Takai
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
9 articles.
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1. Nuclear nanoprobe development for visualization of three-dimensional nanostructures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-08
2. Depth resolution calculations for heavy-ion microbeam RBS analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07
3. Applications of nuclear microprobes to semiconductor process developments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
4. Imaging with high velocity focused ion beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
5. Observation of local SIMOX layers by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03