Angular distributions of gold sputtered from a (111) crystal: Dependence of spot shapes and of spot and background yields on the primary ion mass and energy and on the target temperature-Reference-Cited by-同舟云学术

Angular distributions of gold sputtered from a (111) crystal: Dependence of spot shapes and of spot and background yields on the primary ion mass and energy and on the target temperature

Published:1993-07 Issue:2 Volume:82 Page:220-233
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Szymczak W.,Wittmaack K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference54 articles.

1. Sputtering of Metal Single Crystals by Ion Bombardment

2. Controlled Sputtering of Metals by Low-Energy Hg Ions

3. Sputtering by Particle Bombardment I;Robinson,1981

4. Sputtering by Particle Bombardment III;Hofer,1991

5. Angular distributions of sputtered particles

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