Author:
Junzo Ishikawa ,Hiroshi Tsuji
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
1. Proc. Int. Conf. on Technology and Applications of Ion Beams;Ishikawa,1992
2. Proc. 14th Symp. on Ion Sources and Ion Assisted Technology, ISIAT'91;Fukushima,1991
3. Proc. Symp. on Negative Ion Sources and their Application;Tsuji,1988
4. Negative ion beam technology for materials science (invited)
5. Wafer charging and beam interactions in ion implantation
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