Repetitively pulsed, high-concentration implantation-Reference-Cited by-同舟云学术

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Repetitively pulsed, high-concentration implantation

Published:1991-07 Issue:1 Volume:61 Page:48-51
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Ryabchikov A.I.,Nasyrov R.A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference18 articles.

1. I.B. Kurakin Vozdeistvie puchkcov zar. chastiz na poverkhnost metallov i splavov.;Didenko,1987

2. Azotirovanie stali.;Lachtin,1976

3. Limits of composition achievable by ion implantation

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