Limits of composition achievable by ion implantation
-
Published:1978-09
Issue:5
Volume:15
Page:1629-1635
-
ISSN:0022-5355
-
Container-title:Journal of Vacuum Science and Technology
-
language:en
-
Short-container-title:Journal of Vacuum Science and Technology
Author:
Liau Z. L.,Mayer J. W.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
72 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献