Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield-Reference-Cited by-同舟云学术

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Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield

Published:2021-06 Issue: Volume:188 Page:110188
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Tolstogouzov A.,Mazarov P.,Ieshkin A.E.,Belykh S.F.,Korobeishchikov N.G.,Pelenovich V.O.,Fu D.J.

Funder

Ministry of Education and Science of the Russian Federation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference19 articles.

1. Six decades of atomic collisions in solids

2. Cluster impacts at keV and MeV energies: Secondary emission phenomena

3. High non-additive sputtering of silicon as large positive cluster ions under polyatomic ion bombardment

4. Cluster Secondary Ion Mass Spectrometry: Principles and Applications,2013

5. Model for the emission of quasi-thermal atoms during sputtering of metals in the nonlinear collision cascade regime

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2. Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging;Journal of Vacuum Science & Technology B;2023-10-09

3. GaBiLi - A Novel Focused Ion Beam (FIB) Source for Ion Microscopy and Related Workflows for 3D Tomography with a Top-Down FIB From Liquid Metal Alloy Ion Sources (LMAIS);Microscopy and Microanalysis;2023-07-22

4. Sputtering of coinage metals with bismuth cluster ions: Experiment and computer simulation;Vacuum;2023-07

5. Sputtering of GaAs target under Bi+ cluster ions bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2022-10

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