Author:
Takai M.,Agawa Y.,Ishibashi K.,Hirai K.,Namba S.,Inoue K.,Kawata Y.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
6 articles.
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1. The rapid secondary electron imaging system of the proton beam writer at CIBA;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-07
2. High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004
3. A photomultiplier-based secondary electron imaging system for a nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
4. Nuclear microprobe development and application to microelectronics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
5. Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe;Japanese Journal of Applied Physics;1992-01-15