Peculiarities of the 16O(α, α)16O 3.045 Me V resonance scattering and its application to investigation of oxygen in silicon-Reference-Cited by-同舟云学术

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Peculiarities of the 16O(α, α)16O 3.045 Me V resonance scattering and its application to investigation of oxygen in silicon

Published:1993-11 Issue:3 Volume:83 Page:311-318
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Soroka V.I.,Artsimovich M.V.,Lobach I.Yu.,Mogilnik I.F.,Pavlovich V.N.,Tokarevsky V.V.,Kudriavtsev E.M.,Romanjuk B.N.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference29 articles.

1. Elastic Scattering of Alpha-Particles by Oxygen

2. An investigation of oxygen indiffusion during laser cleaning/annealing of silicon by means of the 16O(α, α0)16O resonance scattering

3. Cross sections for 170.5° backscattering of 4He from oxygen for 4He energies between 1.8 and 5.0 MeV

4. Oxygen distribution profiles in thin evaporated contacts on single crystal silicon

5. Nuclear Reaction Techniques in Materials Analysis

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4. Influence of the Oxygen Partial Pressure on the Composition and Optical Properties of Electron-beam Evaporated TiOx Films;physica status solidi (a);2002-09

5. Quantitative analysis of the oxygen content in TiO2 films deposited by electron-beam evaporation using O(α,α)O resonant elastic scattering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-05

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