Angular resolved energy distribution of secondary ions emitted from a silicon target sputtered by rare gas ions under oblique incidence-Reference-Cited by-同舟云学术

Angular resolved energy distribution of secondary ions emitted from a silicon target sputtered by rare gas ions under oblique incidence

Published:1993-05 Issue:1-4 Volume:78 Page:294-299
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Pellet Claude,Schwebel Christian,Resseguier Corinne

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference24 articles.

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