Undistorted measurements of differential sputtering yields using the collector method by means of electron backscattering-Reference-Cited by-同舟云学术

Undistorted measurements of differential sputtering yields using the collector method by means of electron backscattering

Published:1984-03 Issue:1-3 Volume:2 Page:649-654
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Linders Jörg,Niedrig Heinz,Sternberg Martin

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. W.O. Hofer, in Sputtering by particle bombardment III, ed., R. Behrisch, Topics in applied physics (Springer-Verlag, Berlin, Heidelberg, New York), to be published.

2. Proc. Symp. on Sputtering Perchtoldsdorf;Alexander,1980

3. A penning type ion source with high efficiency and some applications

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