Application of low energy charged particle beams for chlorine analysis in silicon samples
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference9 articles.
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1. PIXE detection limit for aluminium thin film deposited on Si-based matrix;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09
2. RBS and PIXE analysis of chlorine contamination in ALD-Grown TiN films on silicon;AIP Conference Proceedings;2013
3. On the Characterization of Ultra Thin Al Films Deposited onto SiC Substrate Using PIXE Technique;Advanced Materials Research;2011-08
4. On the Quantification of Al Incorporated in SiC Material Using Particle Induced X-Ray Emission Technique;Materials Science Forum;2011-03
5. On the optimization of the PIXE technique for thickness uniformity control of ultra-thin chromium layers deposited onto large surface quartz substrate;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
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