Author:
Kogure Shigeyuki,Tonegawa Akira,Takayama Kazuo,Fukui Ryota,Takagi Kenichi
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. A Compact Sheet Ion Source for Metal Ion Beam;Ion Implantation Technology–92;1993
2. High efficiency metal ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-08
3. Double hollow cathode ion source for metal ion-beam production;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04