Author:
Tonegawa A.,Shimoyama T.,Yabe E.,Takayama K.,Takagi K.,Fukui R.,Kikuchi R.,Okamoto K.,Komiya S.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
7 articles.
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1. Low temperature ion source;Review of Scientific Instruments;1994-04
2. A Gas–Contact Ion Source for Producing Low–Temperature Plasma with High Ion Densities;Ion Implantation Technology–92;1993
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4. A cold cathode ion source with a magnetic hollow cathode;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-05
5. Double hollow cathode ion source for metal ion-beam production;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04