Angular distribution of Ag atoms sputtered with A 5 keV Ar+ ion beam-Reference-Cited by-同舟云学术

Angular distribution of Ag atoms sputtered with A 5 keV Ar+ ion beam

Published:1986-03 Issue:3 Volume:14 Page:263-267
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Szymonski Marek,Weixing Huang ,Onsgaard Jens

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference19 articles.

4. Sputtering by Particle Bombardment I;Sigmund,1981

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

2. Angular distribution of atoms sputtered from amorphous and polycrystalline targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-04

3. Angular distribution of sputtered Ge atoms by low keV Ar+ and Ne+ ion bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-11

5. Energy and angular distributions of sputtered particles;International Journal of Mass Spectrometry and Ion Processes;1994-12