Author:
Golin Jeffrey R.,Schell Neil W.,Glaze James A.,Ozarski Robert G.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
7 articles.
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1. Materials and failure analysis methods and systems used in the development and manufacture of silicon integrated circuits;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-07
2. Comparison of modern uniformity-mapping techniques;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
3. Investigation of arsenic-implanted silicon by optical reflectometry;Vacuum;1991-01
4. Ion Implantation for VLSI;VLSI Electronics Microstructure Science;1989
5. Ion Implantation Diagnostics and Process Control;Ion Implantation Science and Technology;1988