Quantitative SIMS measurements of Al(x)Ga(1−x)As as a function of alloy composition and ion beam energy-Reference-Cited by-同舟云学术

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Quantitative SIMS measurements of Al(x)Ga(1−x)As as a function of alloy composition and ion beam energy

Published:1986-11 Issue:11-12 Volume:36 Page:861-863
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Clark EA

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference5 articles.

1. Secondary Ion Mass Spectrometry III;Barcz,1981

2. Quantitative analysis of low alloy steels by secondary ion mass spectrometry

3. The behaviour of surfaces under ion bombardment

4. Int Conf on Quantitative Surface Analysis;Sykes,1983

5. G J Edge, E A Clark, ECASIA, Amsterdam 1985, SIA to be published.

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1. Overcoming Low Ge Ionization and Erosion Rate Variation for Quantitative Ultralow Energy Secondary Ion Mass Spectrometry Depth Profiles of Si1–xGex/Ge Quantum Well Structures;Analytical Chemistry;2012-02-24

2. Quantification of grafted poly(ethylene glycol)-silanes on silicon by time-of-flight secondary ion mass spectrometry;Journal of Mass Spectrometry;2002

3. SNMS characterization of ion irradiated GaAs surfaces;Applied Surface Science;1996-09

4. Characterization of sharp interfaces and delta doped layers in semiconductors using secondary ion mass spectrometry;Analytica Chimica Acta;1994-10

5. Evaluation of matrix effects in SIMS quantification of AlxGa1−xAs/GaAs heterostructures: a SNMS approach;Applied Surface Science;1994-10

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