Influence of substrate temperature, deposition rate, surface texture and material on the structure of uhv deposited erbium films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference24 articles.
1. Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings
2. Grain structure variation with temperature for evaporated metal films
3. The development of grain structure during growth of metallic films
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