The use of elastic peak spectroscopy in depth profiling
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference4 articles.
1. Improved depth resolution of AES in-depth profiling
2. Elastic peak electron spectroscopy for auger electron spectroscopy and electron energy loss spectroscopy
3. Auger in‐depth profiling of Mo–Si multilayers
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Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Information depth for elastic-peak electron spectroscopy;Surface Science;2004-02
2. Analytical applications of elastic electron backscattering from surfaces;Progress in Surface Science;2003-12
3. Advances in sputter depth profiling using AES;Surface and Interface Analysis;2003
4. Improvement of the depth resolution in sputter depth profiling by elastic peak electron spectroscopy;Surface and Interface Analysis;2002
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