Properties of thin films of magnetic materials produced from DC Magnetron sputtering; the effects of substrate bias and the partial pressure of reactive gases
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
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2. Amorphization of thin supermalloy films Ni79Fe17Mo4 with oxygen during magnetron sputtering;Journal of Alloys and Compounds;2021-02
3. Magnetic Properties of Textured NiFe(111) and NiFe(200) Films;Series Physics;2017
4. Role of oxygen impurity in growth and magnetic properties of Ni83Fe17 permalloy thin films;Journal of Magnetism and Magnetic Materials;2010-11
5. Influence of RF Bias on the Deposition of CrN Studied by OES;Advanced Engineering Materials;2008-07
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