Reactively magnetron sputtered TiAlz.sbnd;N thin films with enhanced mechanical properties
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. Oxidation of metastable single‐phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms
2. Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphere
3. Titanium aluminum nitride films: A new alternative to TiN coatings
4. Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
5. Structure, properties and applications of TiN coatings produced by sputter ion plating
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. TiN–Fe nanocomposite thin films deposited by reactive magnetron sputtering;Journal of Physics D: Applied Physics;2007-11-16
2. New Cr-B hard coatings by r.f.-plasma assisted magnetron sputtering method;Thin Solid Films;1999-04
3. Phase transition and properties of Ti–Al–N thin films prepared by r.f.-plasma assisted magnetron sputtering;Thin Solid Films;1999-02
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