The use of micro-computers in the simulation of ion beam optics
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference4 articles.
1. Measurements of space charge compensation of ion beams
2. Magnetic field of a current ring
3. Structural Engineering and Structural Mechanics;Polivka,1976
4. High power beams for neutral injection heating
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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2. Invited Review Article: Modeling ion beam extraction from different types of ion sources;Review of Scientific Instruments;2018-08
3. Energy resolved angular distribution of argon ions at the substrate plane of a radio frequency plasma reactor;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1992-11
4. Analysis of large‐area beam attacks on surfaces and testing of etching reactions;Review of Scientific Instruments;1992-01
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