Investigation by techniques of electron stimulated desorption of the merits of grow discharge cleaning of the surfaces of vacuum chambers at the CERN intersecting storage rings
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
1. Two Kilometers at 10−10 Torr. The CERN Intersecting Storage Rings for Protons
2. The operation of the ISR facility in relation to the UHV environment
3. Application of the Ion Bombardment Cleaning Method to Titanium, Germanium, Silicon, and Nickel as Determined by Low‐Energy Electron Diffraction
4. Production and Demonstration of Atomically Clean Metal Surfaces
5. Vacuum Deposition of Thin Films;Holland,1961
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Bauelemente der Vakuumtechnik;Springer Reference Technik;2018
2. Bauelemente der Vakuumtechnik;Springer Reference Technik;2018
3. Vacuum Components, Seals, and Joints;Handbook of Vacuum Technology;2016-07-09
4. Bauelemente der Vakuumtechnik und ihre Verbindungen;Wutz Handbuch Vakuumtechnik;2012
5. Applying RF current harmonics for end-point detection during etching multi-layered substrates and cleaning discharge chambers with NF3 discharge;Vacuum;2007-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3