Author:
Brčka Jozef,Harman Rudolf
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
1. Glow Discharge Processes;Chapman,1980
2. Plazmochimiceskoje i ionno-chimiceskoje travlenje mikrostruktur, MBI;Kirejev,1983
3. A kinetic study of the plasma‐etching process. II. Probe measurements of electron properties in an rf plasma‐etching reactor
4. Plasma Diagnostic Techniques;Chen,1965
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