A precision gas flowmeter for vacuum metrology
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference9 articles.
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2. The National Bureau of Standards primary high‐vacuum standard
3. Vacuum gauge calibration by the orifice flow method in the pressure range 10−4-10 pa
4. Summary Abstract: Calibration and long‐term characteristics of helium reference leaks
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